Description

Understand the design, testing, and application of cleanroom robotics and automation with this practical guide. From the history and evolution of cleanroom robots to the latest applications and industry standards, this book provides the only complete overview of the topic available.

Robotics for automating the most demanding cleanroom manufacturing process, the making of semiconductor devices, is used as an example throughout the book. The principles and applications also apply to related industries, including the flat panel display, solar panels, hard disk, nanotechnology, MEMS, and pharmaceutical industries.